Optimized inductively coupled plasma etching for poly(methyl-methacrylate-glycidly-methacrylate) optical waveguide
文献类型：期刊论文
| 作者 | Sun XQ ; Li XD ; Chen CM ; Zhang K ; Meng J ; Wang XB ; Yang TF ; Zhang DM ; Wang F ; Xie ZY |
| 刊名 | thin solid films
 |
| 出版日期 | 2012 |
| 卷号 | 520期号:18页码:5946-5951 |
| 关键词 | FABRICATION TECHNIQUES SCATTERING LOSS POLYMERS POLYCARBONATE STABILITY DEVICES |
| ISSN号 | 0040-6090 |
| 通讯作者 | xie zy |
| 中文摘要 | optical loss is a crucial quality for the application of polymer waveguide devices. the optimized oxygen inductively coupled plasma etching conditions, including antenna power, bias power, chamber pressure, o-2 flow rate and etching time for the fabrication of smooth vertical poly(methyl-methacrylate-glycidly-methacrylate) channel waveguide were systematically investigated. atomic force microscopy and scanning electron microscopy were used to characterize the etch rate, surface roughness and vertical profiles. the increment of etch rate with the antenna power, bias power and o-2 flow rate was observed. bias power and chamber pressure were found to be the main factor affecting the interface roughness. the vertical profiles were proved to be closely related to antenna power, bias power and o-2 flow rate. surface roughness increment was observed when the etching time increased. (c) 2012 elsevier b. v. all rights reserved. |
| 收录类别 | SCI收录期刊论文 |
| 语种 | 英语 |
| WOS记录号 | WOS:000306104100019 |
| 公开日期 | 2013-05-20 |
| 源URL | [http://ir.ciac.jl.cn/handle/322003/48073]  |
| 专题 | 长春应用化学研究所_长春应用化学研究所知识产出_期刊论文 |
| 推荐引用方式 GB/T 7714 | Sun XQ,Li XD,Chen CM,et al. Optimized inductively coupled plasma etching for poly(methyl-methacrylate-glycidly-methacrylate) optical waveguide[J]. thin solid films,2012,520(18):5946-5951. |
| APA | Sun XQ.,Li XD.,Chen CM.,Zhang K.,Meng J.,...&Xie ZY.(2012).Optimized inductively coupled plasma etching for poly(methyl-methacrylate-glycidly-methacrylate) optical waveguide.thin solid films,520(18),5946-5951. |
| MLA | Sun XQ,et al."Optimized inductively coupled plasma etching for poly(methyl-methacrylate-glycidly-methacrylate) optical waveguide".thin solid films 520.18(2012):5946-5951. |
入库方式： OAI收割
来源：长春应用化学研究所
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