中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Rapid thermal annealing properties of ZnO films grown using methanol as oxidant

文献类型:期刊论文

作者Zhang PF (Zhang, P. F.) ; Liu XL (Liu, X. L.) ; Wei HY (Wei, H. Y.) ; Fan HB (Fan, H. B.) ; Liang ZM (Liang, Z. M.) ; Jin P (Jin, P.) ; Yang SY (Yang, S. Y.) ; Jiao CM (Jiao, C. M.) ; Zhu QS (Zhu, Q. S.) ; Wang ZG (Wang, Z. G.)
刊名journal of physics d-applied physics
出版日期2007
卷号40期号:19页码:6010-6013
ISSN号issn: 0022-3727
关键词CHEMICAL-VAPOR-DEPOSITION
通讯作者zhang, pf, chinese acad sci, inst semicond, key lab semicond mat sci, pob 912, beijing 100083, peoples r china. 电子邮箱地址: zhangpanf@semi.ac.cn ; xlliu@semi.ac.cn
中文摘要zno thin films were grown by metal-organic chemical vapour deposition using methanol as oxidant. rapid thermal annealing (rta) was performed in an ambient of one atmosphere oxygen at 900 degrees c for 60 s. the rta properties of the films have been characterized using scanning electron microscopy, x-ray diffraction, x-ray photoelectron spectroscopy, photoluminescence spectra and hall measurement. the grains of the film were well coalesced and the surface became denser after rta. the full-width at half maximum of rocking curves was only 496 arcsec. the zno films were also proved to have good optical quality. the hall mobility increased to 43.2 cm(2) v-1 s(-1) while the electron concentration decreased to 6.6 x 10(16) cm(-3). it is found that methanol is a potential oxidant for zno growth and the quality of zno film can be improved substantially through rta.
学科主题半导体材料
收录类别SCI
语种英语
公开日期2010-03-29
源URL[http://ir.semi.ac.cn/handle/172111/9210]  
专题半导体研究所_中国科学院半导体研究所(2009年前)
推荐引用方式
GB/T 7714
Zhang PF ,Liu XL ,Wei HY ,et al. Rapid thermal annealing properties of ZnO films grown using methanol as oxidant[J]. journal of physics d-applied physics,2007,40(19):6010-6013.
APA Zhang PF .,Liu XL .,Wei HY .,Fan HB .,Liang ZM .,...&Wang ZG .(2007).Rapid thermal annealing properties of ZnO films grown using methanol as oxidant.journal of physics d-applied physics,40(19),6010-6013.
MLA Zhang PF ,et al."Rapid thermal annealing properties of ZnO films grown using methanol as oxidant".journal of physics d-applied physics 40.19(2007):6010-6013.

入库方式: OAI收割

来源:半导体研究所

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