Rapid thermal annealing properties of ZnO films grown using methanol as oxidant
文献类型:期刊论文
作者 | Zhang PF (Zhang, P. F.) ; Liu XL (Liu, X. L.) ; Wei HY (Wei, H. Y.) ; Fan HB (Fan, H. B.) ; Liang ZM (Liang, Z. M.) ; Jin P (Jin, P.) ; Yang SY (Yang, S. Y.) ; Jiao CM (Jiao, C. M.) ; Zhu QS (Zhu, Q. S.) ; Wang ZG (Wang, Z. G.) |
刊名 | journal of physics d-applied physics |
出版日期 | 2007 |
卷号 | 40期号:19页码:6010-6013 |
ISSN号 | issn: 0022-3727 |
关键词 | CHEMICAL-VAPOR-DEPOSITION |
通讯作者 | zhang, pf, chinese acad sci, inst semicond, key lab semicond mat sci, pob 912, beijing 100083, peoples r china. 电子邮箱地址: zhangpanf@semi.ac.cn ; xlliu@semi.ac.cn |
中文摘要 | zno thin films were grown by metal-organic chemical vapour deposition using methanol as oxidant. rapid thermal annealing (rta) was performed in an ambient of one atmosphere oxygen at 900 degrees c for 60 s. the rta properties of the films have been characterized using scanning electron microscopy, x-ray diffraction, x-ray photoelectron spectroscopy, photoluminescence spectra and hall measurement. the grains of the film were well coalesced and the surface became denser after rta. the full-width at half maximum of rocking curves was only 496 arcsec. the zno films were also proved to have good optical quality. the hall mobility increased to 43.2 cm(2) v-1 s(-1) while the electron concentration decreased to 6.6 x 10(16) cm(-3). it is found that methanol is a potential oxidant for zno growth and the quality of zno film can be improved substantially through rta. |
学科主题 | 半导体材料 |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2010-03-29 |
源URL | [http://ir.semi.ac.cn/handle/172111/9210] |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Zhang PF ,Liu XL ,Wei HY ,et al. Rapid thermal annealing properties of ZnO films grown using methanol as oxidant[J]. journal of physics d-applied physics,2007,40(19):6010-6013. |
APA | Zhang PF .,Liu XL .,Wei HY .,Fan HB .,Liang ZM .,...&Wang ZG .(2007).Rapid thermal annealing properties of ZnO films grown using methanol as oxidant.journal of physics d-applied physics,40(19),6010-6013. |
MLA | Zhang PF ,et al."Rapid thermal annealing properties of ZnO films grown using methanol as oxidant".journal of physics d-applied physics 40.19(2007):6010-6013. |
入库方式: OAI收割
来源:半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。