Fabrication of photonic crystals on several kinds of semiconductor materials by using focused-ion beam method
文献类型：期刊论文
| 作者 | Xu XS (Xu Xingsheng) ; Chen HD (Chen Hongda) ; Xiong ZG (Xiong Zhigang) ; Jin AZ (Jin Aizi) ; Gu CZ (Gu Changzhi) ; Cheng BY (Cheng Bingying) ; Zhang DZ (Zhang Daozhong) |
| 刊名 | thin solid films
 |
| 出版日期 | 2007 |
| 卷号 | 515期号:22页码:8297-8300 |
| 关键词 | photonic crystal |
| ISSN号 | issn: 0040-6090 |
| 通讯作者 | xu, xs, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: xsxu@red.semi.ac.cn |
| 中文摘要 | in this paper, we introduced the fabrication of photonic crystals on several kinds of semiconductor materials by using focused-ion beam machine, it shows that the method of focused-ion beam can fabricate two-dimensional photonic crystal and photonic crystal device efficiently, and the quality of the fabricated photonic crystal is high. using the focused-ion beam method, we fabricate photonic crystal wavelength division multiplexer, and its characteristics are analyzed. (c) 2007 elsevier b.v. all rights reserved. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/9252]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Xu XS ,Chen HD ,Xiong ZG ,et al. Fabrication of photonic crystals on several kinds of semiconductor materials by using focused-ion beam method[J]. thin solid films,2007,515(22):8297-8300. |
| APA | Xu XS .,Chen HD .,Xiong ZG .,Jin AZ .,Gu CZ .,...&Zhang DZ .(2007).Fabrication of photonic crystals on several kinds of semiconductor materials by using focused-ion beam method.thin solid films,515(22),8297-8300. |
| MLA | Xu XS ,et al."Fabrication of photonic crystals on several kinds of semiconductor materials by using focused-ion beam method".thin solid films 515.22(2007):8297-8300. |
入库方式： OAI收割
来源：半导体研究所
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