A novel implantable multichannel silicon-based microelectrode
文献类型：期刊论文
| 作者 | Sui XH (Sui Xiao-Hong) ; Zhang RX (Zhang Ruo-Xin) ; Pei WH (Pei Wei-Hua) ; Chen HD (Chen Hong-Da) |
| 刊名 | chinese physics
 |
| 出版日期 | 2007 |
| 卷号 | 16期号:7页码:2116-2119 |
| 关键词 | MEMS |
| ISSN号 | issn: 1009-1963 |
| 通讯作者 | sui, xh, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: xhsui@mail.semi.ac.cn |
| 中文摘要 | silicon-based microelectrodes have been confirmed to be helpful in neural prostheses. the fabricated 7-channel silicon-based microelectrode was feasible to be implanted into the brain cortex. the manufacturing process by microelectromechanical system (mems) technology was detailed with four photolithographic masks. the microscopic photographs and sem images indicated that the probe shank was 3mm long, 100 mu m wide and 20 mu m thick with the recording sites spaced 120 mu m apart for good signal isolation. to facilitate the insertion and minimize the trauma, the microelectrode is narrowed down gradually near the tip with the tip taper angle of 6 degrees. curve of the single recording site impedance versus frequency was shown by test in vitro and the impedance declined from 150.5 k omega to 6.0 k omega with frequency changing from 10 k to 10mhz. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/9330]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Sui XH ,Zhang RX ,Pei WH ,et al. A novel implantable multichannel silicon-based microelectrode[J]. chinese physics,2007,16(7):2116-2119. |
| APA | Sui XH ,Zhang RX ,Pei WH ,&Chen HD .(2007).A novel implantable multichannel silicon-based microelectrode.chinese physics,16(7),2116-2119. |
| MLA | Sui XH ,et al."A novel implantable multichannel silicon-based microelectrode".chinese physics 16.7(2007):2116-2119. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。