Recent advances in synthesis and properties of cubic boron nitride films
文献类型：期刊论文
| 作者 | Zhang XW (Zhang Xing-Wang) ; You JB (You Jing-Bi) ; Chen NF (Chen Nuo-Fu) |
| 刊名 | journal of inorganic materials
 |
| 出版日期 | 2007 |
| 卷号 | 22期号:3页码:385-390 |
| 关键词 | cubic boron nitride (c-BN) films |
| ISSN号 | issn: 1000-324x |
| 通讯作者 | zhang, xw, chinese acad sci, inst semicond, key lab semicond mat sci, beijing 100083, peoples r china. 电子邮箱地址: xwzhang@semi.ac.cn |
| 中文摘要 | cubic boron nitride (c-bn) attracts widespread interest as a promising material for many potential applications because of its unique physical and chemical properties. since the 1980's the research in c-bn thin films has been carried out, which reached its summit in the mid of 1990's, then turned into a downward period. in the past few years, however, important progress was achieved in synthesis and properties of cubic boron nitride films, such as obtaining > 1 mu m thick c-bn films, epitaxial growth of single crystalline c-bn films, and advances in mechanics properties and microstructures of the interlayer of c-bn films. the present article reviews the current status of the synthesis and properties of c-bn thin films. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 中文 |
| 公开日期 | 2010-03-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/9432]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Zhang XW ,You JB ,Chen NF . Recent advances in synthesis and properties of cubic boron nitride films[J]. journal of inorganic materials,2007,22(3):385-390. |
| APA | Zhang XW ,You JB ,&Chen NF .(2007).Recent advances in synthesis and properties of cubic boron nitride films.journal of inorganic materials,22(3),385-390. |
| MLA | Zhang XW ,et al."Recent advances in synthesis and properties of cubic boron nitride films".journal of inorganic materials 22.3(2007):385-390. |
入库方式： OAI收割
来源：半导体研究所
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