The research and progress of micro-fabrication technologies of two-dimensional photonic crystal
文献类型：期刊论文
| 作者 | Xu, XS (Xu XingSheng) ; Zhang, DZ (Zhang DaoZhong) |
| 刊名 | chinese science bulletin
 |
| 出版日期 | 2007 |
| 卷号 | 52期号:7页码:865-876 |
| 关键词 | photonic crystal |
| ISSN号 | issn: 1001-6538 |
| 通讯作者 | xu, xs, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: xsxu@red.semi.ac.cn |
| 中文摘要 | the novel material of photonic crystal makes it possible to control a photon, and the photonic integration will have breakthrough progress due to the application of photonic crystal. it is based on the photonic crystal device that the photonic crystal integration could be realized. therefore, we should first investigate photonic crystal devices based on the active and the passive semiconductor materials, which may have great potential application in photonic integration. the most practical and important method to fabricate two-dimensional photonic crystal is the micro-manufacture method. in this paper, we summarize and evaluate the fabrication methods of two-dimensional photonic crystal in near-infrared region, including electron beam lithography, selection of mask, dry etching, and some works of ours. this will be beneficial to the study of the photonic crystal in china. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-03-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/9454]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Xu, XS ,Zhang, DZ . The research and progress of micro-fabrication technologies of two-dimensional photonic crystal[J]. chinese science bulletin,2007,52(7):865-876. |
| APA | Xu, XS ,&Zhang, DZ .(2007).The research and progress of micro-fabrication technologies of two-dimensional photonic crystal.chinese science bulletin,52(7),865-876. |
| MLA | Xu, XS ,et al."The research and progress of micro-fabrication technologies of two-dimensional photonic crystal".chinese science bulletin 52.7(2007):865-876. |
入库方式： OAI收割
来源：半导体研究所
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