Fabrication of photonic crystal on semiconductor materials by using focued ion-beam
文献类型：期刊论文
| 作者 | Xu XS (Xu Xing-Sheng) ; Xiong ZG (Xiong Zhi-Gang) ; Jin AZ (Jin Ai-Zi) ; Chen HD (Chen Hong-Da) ; Zhang DZ (Zhang Dao-Zhong) |
| 刊名 | acta physica sinica
 |
| 出版日期 | 2007 |
| 卷号 | 56期号:2页码:916-921 |
| ISSN号 | issn: 1000-3290 |
| 关键词 | focused ion beam |
| 通讯作者 | xu, xs, chinese acad sci, inst semicond, key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: xsxu@red.semi.ac.cn |
| 中文摘要 | a method of manufacturing two-dimensional photonic crystals on several kinds of semiconductor materials in near infrared region by a focused ion beam is introduced, and the corresponding fabrication results are presented and show that the obtained parameters of fabricated photonic crystals are identical with the designed ones. using the tunable laser source, the spectra of the fabricated passive photonic crystal and the active photonic crystal are measured. the experiment demonstrates that the focused ion-beam can be used to fabricate the perfect two-dimensional photonic crystals and their devices. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 中文 |
| 公开日期 | 2010-03-29 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/9674]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Xu XS ,Xiong ZG ,Jin AZ ,et al. Fabrication of photonic crystal on semiconductor materials by using focued ion-beam[J]. acta physica sinica,2007,56(2):916-921. |
| APA | Xu XS ,Xiong ZG ,Jin AZ ,Chen HD ,&Zhang DZ .(2007).Fabrication of photonic crystal on semiconductor materials by using focued ion-beam.acta physica sinica,56(2),916-921. |
| MLA | Xu XS ,et al."Fabrication of photonic crystal on semiconductor materials by using focued ion-beam".acta physica sinica 56.2(2007):916-921. |
入库方式： OAI收割
来源：半导体研究所
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