Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing
文献类型:期刊论文
作者 | Xu Y (Xu Ying) ; Diao HW (Diao Hong-Wei) ; Hao HY (Hao Hui-Ying) ; Zeng XB (Zeng Xiang-Bo) ; Liao XB (Liao Xian-Bo) |
刊名 | chinese physics
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出版日期 | 2006 |
卷号 | 15期号:10页码:2397-2401 |
关键词 | emitter rapid thermal processing (RTP) PECVD solar cell SILICON FILMS |
ISSN号 | 1009-1963 |
通讯作者 | xu, y, chinese acad sci, inst semicond, state lab surface phys, beijing 100083, peoples r china. |
中文摘要 | in this paper, we use a pulsed rapid thermal processing (rtp) approach to create an emitter layer of hetero-junction solar cell. the process parameters and crystallization behaviour are studied. the structural, optical and electric properties of the crystallized films are also investigated. both the depth of pn junction and the conductivity of the emitter layer increase with the number of rtp pulses increasing. simulation results show that efficiencies of such solar cells can exceed 15% with a lower interface recombination rate, but the highest efficiency is 11.65% in our experiments. |
学科主题 | 半导体物理 |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2010-04-11 |
源URL | [http://ir.semi.ac.cn/handle/172111/10378] ![]() |
专题 | 半导体研究所_中国科学院半导体研究所(2009年前) |
推荐引用方式 GB/T 7714 | Xu Y ,Diao HW ,Hao HY ,et al. Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing[J]. chinese physics,2006,15(10):2397-2401. |
APA | Xu Y ,Diao HW ,Hao HY ,Zeng XB ,&Liao XB .(2006).Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing.chinese physics,15(10),2397-2401. |
MLA | Xu Y ,et al."Emitter of hetero-junction solar cells created using pulsed rapid thermal annealing".chinese physics 15.10(2006):2397-2401. |
入库方式: OAI收割
来源:半导体研究所
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