Effects of grain size on the mosaic tilt and twist in InN films grown on GaN by metal-organic chemical vapor deposition
文献类型：期刊论文
| 作者 | Wang H (Wang H.) ; Huang Y (Huang Y.) ; Sun Q (Sun Q.) ; Chen J (Chen J.) ; Wang LL (Wang L. L.) ; Zhu JJ (Zhu J. J.) ; Zhao DG (Zhao D. G.) ; Zhang SM (Zhang S. M.) ; Jiang DS (Jiang D. S.) ; Wang YT (Wang Y. T.) ; Yang H (Yang H.) |
| 刊名 | applied physics letters
 |
| 出版日期 | 2006 |
| 卷号 | 89期号:9页码:art.no.092114 |
| 关键词 | X-RAY-DIFFRACTION ELECTRON-TRANSPORT EPITAXIAL GAN BAND-GAP DISLOCATIONS SAPPHIRE ALN |
| ISSN号 | 0003-6951 |
| 通讯作者 | wang, h, chinese acad sci, inst semicond, state key lab integrated optoelect, pob 912, beijing 100083, peoples r china. e-mail: wangh@red.semi.ac.cn |
| 中文摘要 | the structural property of inn films grown on ga-face gan layers by metal-organic chemical vapor deposition has been studied by high-resolution x-ray diffraction. the mosaic tilt and twist are found to be strongly dependent on the surface lateral grain size. the twist decreases with increasing grain size and finally approaches to a constant level. on the other hand, the mosaic tilt increases substantially when the grain size becomes large enough and exceeds the width of step terraces on the gan surface, showing an important mechanism for the defect generation in the inn/gan system with large out-of-plane lattice mismatch. (c) 2006 american institute of physics. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-04-11 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/10432]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Wang H ,Huang Y ,Sun Q ,et al. Effects of grain size on the mosaic tilt and twist in InN films grown on GaN by metal-organic chemical vapor deposition[J]. applied physics letters,2006,89(9):art.no.092114. |
| APA | Wang H .,Huang Y .,Sun Q .,Chen J .,Wang LL .,...&Yang H .(2006).Effects of grain size on the mosaic tilt and twist in InN films grown on GaN by metal-organic chemical vapor deposition.applied physics letters,89(9),art.no.092114. |
| MLA | Wang H ,et al."Effects of grain size on the mosaic tilt and twist in InN films grown on GaN by metal-organic chemical vapor deposition".applied physics letters 89.9(2006):art.no.092114. |
入库方式： OAI收割
来源：半导体研究所
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