Evolution of mosaic structure in InN grown by metalorganic chemical vapor deposition
文献类型：期刊论文
| 作者 | Huang Y (Huang Y.) ; Wang H (Wang H.) ; Sun Q (Sun Q.) ; Chen J (Chen J.) ; Li DY (Li D. Y.) ; Zhang JC (Zhang J. C.) ; Wang JF (Wang J. F.) ; Wang YT (Wang Y. T.) ; Yang H (Yang H.) |
| 刊名 | journal of crystal growth
 |
| 出版日期 | 2006 |
| 卷号 | 293期号:2页码:269-272 |
| 关键词 | growth mode X-ray diffraction metalorganic chemical vapor deposition indium nitride X-RAY-DIFFRACTION THREADING DISLOCATIONS ELECTRON-TRANSPORT BUFFER LAYER THIN-FILMS GAN FILMS SAPPHIRE ALN |
| ISSN号 | 0022-0248 |
| 通讯作者 | wang, h, chinese acad sci, inst semicond, state key lab integrated optoelect, pob 912, beijing 100083, peoples r china. e-mail: wangh@red.semi.ac.cn |
| 中文摘要 | mosaic structure in inn layers grown by metalorganic chemical vapor deposition at various temperatures has been investigated by x-ray diffraction (xrd). with a combination of williamson-hall measurement and fitting of twist angles, it was found that variation of growth temperature from 450 to 550 degrees c leads to the variation of the lateral coherence length, vertical coherence length, tilt and twist of mosaic blocks in inn films in a, respectively, monotonic way. in particular, mosaic tilt increases whereas mosaic twist decreases with elevating temperature. atomic force microscopy shows the morphological difference of the inn nucleation layers grown at 450 and 550 degrees c. different coalescence thickness and temperature-dependent in-plane rotation of inn nuclei are considered to account for the xrd results. (c) 2006 elsevier b.v. all rights reserved. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-04-11 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/10452]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Huang Y ,Wang H ,Sun Q ,et al. Evolution of mosaic structure in InN grown by metalorganic chemical vapor deposition[J]. journal of crystal growth,2006,293(2):269-272. |
| APA | Huang Y .,Wang H .,Sun Q .,Chen J .,Li DY .,...&Yang H .(2006).Evolution of mosaic structure in InN grown by metalorganic chemical vapor deposition.journal of crystal growth,293(2),269-272. |
| MLA | Huang Y ,et al."Evolution of mosaic structure in InN grown by metalorganic chemical vapor deposition".journal of crystal growth 293.2(2006):269-272. |
入库方式： OAI收割
来源：半导体研究所
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