Optical properties of semiconductor quantum-well material using photonic crystal fabricated by micro-fabrication machine
文献类型：期刊论文
| 作者 | Xu XS ; Xiong ZG ; Sun ZH ; Du W ; Lu L ; Chen HD ; Jin AZ ; Zhang DZ |
| 刊名 | acta physica sinica
 |
| 出版日期 | 2006 |
| 卷号 | 55期号:3页码:1248-1252 |
| 关键词 | focused ion beam electron beam lithography photonic crystal extraction efficiency LIGHT EXTRACTION SLAB |
| ISSN号 | 1000-3290 |
| 通讯作者 | xu, xs, chinese acad sci, inst semicond, key lab integrated optoelect, beijing 100083, peoples r china. e-mail: xsxu@red.semi.ac.cn |
| 中文摘要 | two-dimensional photonic crystals in near infrared region were fabricated by using the focused ion beam ( fib) method and the method of electron-beam lithography (ebl) combined with dry etching. both methods can fabricate perfect crystals, the method of fib is simple,the other is more complicated. it is shown that the material with the photonic crystal fabricated by fib has no fluorescence,on the other hand, the small-lattice photonic crystal made by ebl combined with dry etching can enhance the extraction efficiency two folds, though the photonic crystal has some disorder. the mechanisms of the enhanced-emission and the absence of emission are also discussed. |
| 学科主题 | 光电子学 |
| 收录类别 | SCI |
| 语种 | 中文 |
| 公开日期 | 2010-04-11 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/10798]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Xu XS,Xiong ZG,Sun ZH,et al. Optical properties of semiconductor quantum-well material using photonic crystal fabricated by micro-fabrication machine[J]. acta physica sinica,2006,55(3):1248-1252. |
| APA | Xu XS.,Xiong ZG.,Sun ZH.,Du W.,Lu L.,...&Zhang DZ.(2006).Optical properties of semiconductor quantum-well material using photonic crystal fabricated by micro-fabrication machine.acta physica sinica,55(3),1248-1252. |
| MLA | Xu XS,et al."Optical properties of semiconductor quantum-well material using photonic crystal fabricated by micro-fabrication machine".acta physica sinica 55.3(2006):1248-1252. |
入库方式： OAI收割
来源：半导体研究所
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