中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Changing the size and shape of Ge island by chemical etching

文献类型:期刊论文

作者Gao F ; Huang CJ ; Huang DD ; Li JP ; Sun DZ ; Kong MY ; Zeng YP ; Li JM ; Lin LY
刊名journal of crystal growth
出版日期2001
卷号231期号:1-2页码:17-21
关键词atomic force microscopy etching nanostructures molecular beam epitaxy semiconducting germanium semiconducting silicon QUANTUM DOTS INAS GROWTH STRAIN
ISSN号0022-0248
通讯作者gao f,chinese acad sci,inst semicond,ctr mat sci,pob 912,beijing 100083,peoples r china.
中文摘要self-assembled ge islands were grown on si (1 0 0) substrate by si2h6-ge molecular beam epitaxy. subjected to a chemical etching, it is found that the size and shape (i.e. ratio of height to base width) of ge islands change with etching time. in addition, the photoluminescence from the etched ge islands shifted to the higher energy side compared to that of the as-deposited ge islands. our results demonstrated that chemical etching can be a way to change the size and shape of the as-deposited islands as well as their luminescence property. (c) 2001 elsevier science b.v. all rights reserved.
学科主题半导体材料
收录类别SCI
语种英语
公开日期2010-08-12
源URL[http://ir.semi.ac.cn/handle/172111/12128]  
专题半导体研究所_中国科学院半导体研究所(2009年前)
推荐引用方式
GB/T 7714
Gao F,Huang CJ,Huang DD,et al. Changing the size and shape of Ge island by chemical etching[J]. journal of crystal growth,2001,231(1-2):17-21.
APA Gao F.,Huang CJ.,Huang DD.,Li JP.,Sun DZ.,...&Lin LY.(2001).Changing the size and shape of Ge island by chemical etching.journal of crystal growth,231(1-2),17-21.
MLA Gao F,et al."Changing the size and shape of Ge island by chemical etching".journal of crystal growth 231.1-2(2001):17-21.

入库方式: OAI收割

来源:半导体研究所

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