Silicon-on-insulator based 2 x 2 multimode interference coupler with large tolerance
文献类型：期刊论文
| 作者 | Wei HZ ; Yu JZ ; Liu ZL ; Zhang XF ; Shi W ; Fang CS |
| 刊名 | chinese physics letters
 |
| 出版日期 | 2001 |
| 卷号 | 18期号:2页码:245-247 |
| 关键词 | POWER SPLITTERS |
| ISSN号 | 0256-307x |
| 通讯作者 | wei hz,chinese acad sci,state key lab integrated optoelect,beijing 100083,peoples r china. |
| 中文摘要 | we demonstrate a type of 2 x 2 multimode interference 3 db coupler based on silicon-on-insulator. the fabrication tolerance was investigated by the effective index method and the guide mode method. the devices with different lengths were fabricated and near-held output images were obtained. tolerances to width, length and etch depth are 2, 200 and 2 mum, respectively. the devices show a uniform power distribution. |
| 学科主题 | 半导体物理 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-08-12 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/12298]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Wei HZ,Yu JZ,Liu ZL,et al. Silicon-on-insulator based 2 x 2 multimode interference coupler with large tolerance[J]. chinese physics letters,2001,18(2):245-247. |
| APA | Wei HZ,Yu JZ,Liu ZL,Zhang XF,Shi W,&Fang CS.(2001).Silicon-on-insulator based 2 x 2 multimode interference coupler with large tolerance.chinese physics letters,18(2),245-247. |
| MLA | Wei HZ,et al."Silicon-on-insulator based 2 x 2 multimode interference coupler with large tolerance".chinese physics letters 18.2(2001):245-247. |
入库方式： OAI收割
来源：半导体研究所
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