Hydrogenated amorphous silicon films with significantly improved stability
文献类型：期刊论文
| 作者 | Sheng SR ; Liao XB ; Ma ZX ; Yue GZ ; Wang YQ ; Kong GL |
| 刊名 | solar energy materials and solar cells
 |
| 出版日期 | 2001 |
| 卷号 | 68期号:1页码:123-133 |
| 关键词 | amorphous silicon stability A-SI-H CONSTANT PHOTOCURRENT METHOD PERSISTENT PHOTOCONDUCTIVITY URBACH EDGE SOLAR-CELLS GAP STATES ABSORPTION DENSITY SPECTROSCOPY INCREASE |
| ISSN号 | 0927-0248 |
| 通讯作者 | liao xb,chinese acad sci,inst semicond,state lab surface phys,beijing 100083,peoples r china. |
| 中文摘要 | a new regime of plasma-enhanced chemical-vapor deposition (pecvd), referred to as "uninterrupted growth/annealing" method, has been proposed for preparation of high-quality hydrogenated amorphous silicon (a-si:h) films. by using this regime, the deposition process no longer needs to be interrupted, as done in the chemical annealing or layer by layer deposition, while the growing surface is continuously subjected to an enhanced annealing treatment with atomic hydrogen created in the hydrogen-diluted reactant gas mixture at a relatively high plasma power. the intensity of the hydrogen plasma treatment is controlled at such a level that the deposition conditions of the resultant films approach the threshold for microcrystal formation. in addition, a low level of b-compensation is used to adjust the position of the fermi level close to the midgap. under these conditions, we find that the stability and optoelectronic properties of a-si:h films have been significantly improved. (c) 2001 elsevier science b.v. all rights reserved. |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-08-12 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/12314]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Sheng SR,Liao XB,Ma ZX,et al. Hydrogenated amorphous silicon films with significantly improved stability[J]. solar energy materials and solar cells,2001,68(1):123-133. |
| APA | Sheng SR,Liao XB,Ma ZX,Yue GZ,Wang YQ,&Kong GL.(2001).Hydrogenated amorphous silicon films with significantly improved stability.solar energy materials and solar cells,68(1),123-133. |
| MLA | Sheng SR,et al."Hydrogenated amorphous silicon films with significantly improved stability".solar energy materials and solar cells 68.1(2001):123-133. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。