中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Evolution of height distribution of Ge islands on Si(1 0 0)

文献类型:期刊论文

作者Liu JP ; Gong Q ; Huang DD ; Li JP ; Sun DZ ; Kong MY
刊名journal of crystal growth
出版日期1999
卷号200期号:3-4页码:617-620
关键词Ge islands Ge films bimodal distribution Ehrlich-Schwoebel barriers SI(001) HETEROEPITAXIAL GROWTH
ISSN号0022-0248
通讯作者liu jp,chinese acad sci,inst semicond,ctr mat sci,pob 912,beijing 100083,peoples r china.
中文摘要evolution of the height distribution of ge islands during in situ annealing of ge films on si(1 0 0) has been studied. island height is found to have a bimodal distribution. the standard deviation of the island height divided by the mean island height, for the mode of larger island size is more than that for the other mode. we suggest that the presence of ehrlich-schwoebel barriers, combined with the misfit strain, can lead to the bimodal distribution of island size, the mode of larger island size having narrower base size distribution, but wider height distribution for ge islands on si(1 0 0). the bimodal distribution of island size could be stable due to kinetics without necessarily regarding it as minimum-energy configuration. (c) 1999 elsevier science b.v. all rights reserved.
学科主题半导体材料
收录类别SCI
语种英语
公开日期2010-08-12
源URL[http://ir.semi.ac.cn/handle/172111/12940]  
专题半导体研究所_中国科学院半导体研究所(2009年前)
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GB/T 7714
Liu JP,Gong Q,Huang DD,et al. Evolution of height distribution of Ge islands on Si(1 0 0)[J]. journal of crystal growth,1999,200(3-4):617-620.
APA Liu JP,Gong Q,Huang DD,Li JP,Sun DZ,&Kong MY.(1999).Evolution of height distribution of Ge islands on Si(1 0 0).journal of crystal growth,200(3-4),617-620.
MLA Liu JP,et al."Evolution of height distribution of Ge islands on Si(1 0 0)".journal of crystal growth 200.3-4(1999):617-620.

入库方式: OAI收割

来源:半导体研究所

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