Realization of SOI submicrometer optical waveguide components - art. no. 68380L
文献类型：会议论文
| 作者 | Xu XJ ; Chen SW ; Yu JZ ; Tu XG |
| 出版日期 | 2008 |
| 会议名称 | 2nd conference on optoelectronic devices and integration |
| 会议日期 | nov 12-15, 2007 |
| 会议地点 | beijing, peoples r china |
| 关键词 | silicon-on-insulator |
| 页码 | 6838: l8380-l8380 |
| 通讯作者 | xu, xj, chinese acad sci, inst semicond, state key lab optoelect, pob 912, beijing 100083, peoples r china. |
| 中文摘要 | submicrometer channel and rib waveguides based on soi (silicon-on-insulator) have been designed and fabricated with electron-beam lithography and inductively coupled plasma dry etching. propagation loss of 8.39db/mm was measured using the cut-back method. based on these so-called nanowire waveguides, we have also demonstrated some functional components with small dimensions, including sharp 90 degrees bends with radius of a few micrometers, t-branches, directional couplers and multimode interferometer couplers. |
| 英文摘要 | submicrometer channel and rib waveguides based on soi (silicon-on-insulator) have been designed and fabricated with electron-beam lithography and inductively coupled plasma dry etching. propagation loss of 8.39db/mm was measured using the cut-back method. based on these so-called nanowire waveguides, we have also demonstrated some functional components with small dimensions, including sharp 90 degrees bends with radius of a few micrometers, t-branches, directional couplers and multimode interferometer couplers.; zhangdi于2010-03-09批量导入; zhangdi于2010-03-09批量导入; spie.; chinese opt soc.; [xu, xuejun; chen, shaowu; yu, jinzhong; tu, xiaoguang] chinese acad sci, inst semicond, state key lab optoelect, beijing 100083, peoples r china |
| 收录类别 | 其他 |
| 会议主办者 | spie.; chinese opt soc. |
| 会议录 | optoelectronic devices and integration ii
 |
| 会议录出版者 | spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
| 学科主题 | 光电子学 |
| 会议录出版地 | 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
| 语种 | 英语 |
| ISSN号 | 0277-786x |
| ISBN号 | 978-0-8194-7013-3 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/7798]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Xu XJ,Chen SW,Yu JZ,et al. Realization of SOI submicrometer optical waveguide components - art. no. 68380L[C]. 见:2nd conference on optoelectronic devices and integration. beijing, peoples r china. nov 12-15, 2007. |
入库方式： OAI收割
来源：半导体研究所
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