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Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies

文献类型：期刊论文

作者Zhang Y(张吟)
刊名Sensors and Actuators A-Physical
出版日期2013-05-01
卷号194页码:169-175
通讯作者邮箱zhangyin@lnm.imech.ac.cn
关键词Surface stress Resonant frequencies Adsorption Resonator sensor
ISSN号0924-4247
产权排序Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China
通讯作者Zhang, Y (reprint author), Chinese Acad Sci, Inst Mech, State Key Lab Nonlinear Mech LNM, Beijing 100190, Peoples R China.
中文摘要The adsorption-induced surface stress and mass can cause the resonant frequency shifts of a microcantilever, which is used as the sensing mechanism for a resonator sensor. Determining the adsorption-induced surface stress and mass from the experimentally measured data of resonant frequencies forms an inverse problem. Because there are infinite combinations of surface stress and mass which can result in the same change of one resonant frequency, the previous studies usually measure surface stress or mass by one measurement method and then find the other by another different measurement method. This study shows that surface stress and mass have different impacts on the resonant frequencies of a microcantilever. Two resonant frequencies are used to uniquely determine the adsorption-induced surface stress and mass. Mathematically, the new method presented in this study provides an efficient and straightforward solution to the inverse problem and its accuracy is also demonstrated. Physically, the new method only requires the dynamic mode to measure the resonant frequencies, which should be of a great help to various sensor applications.
学科主题微机电系统中的固体力学问题
分类号二类/Q1
收录类别SCI ; EI
资助信息National Natural Science Foundation of China (NSFC) [110212622, 11023001]; Chinese Academy of Sciences [KJCX2-EW-L03]
原文出处http://dx.doi.org/10.1016/j.sna.2013.01.029
语种英语
WOS记录号WOS:000319306800021
公开日期2013-07-10
源URL[http://dspace.imech.ac.cn/handle/311007/47322]  
专题力学研究所_非线性力学国家重点实验室
推荐引用方式
GB/T 7714		 Zhang Y. Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies[J]. Sensors and Actuators A-Physical,2013,194:169-175.
APA Zhang Y.(2013).Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies.Sensors and Actuators A-Physical,194,169-175.
MLA Zhang Y."Determining the adsorption-induced surface stress and mass by measuring the shift of resonant frequencies".Sensors and Actuators A-Physical 194(2013):169-175.

入库方式： OAI收割

来源：力学研究所

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