Accurate vibration detection of a rough surface - art. no. 683118
文献类型：会议论文
| 作者 | Zeng, HL ; Zhou, Y ; Fan, ST ; He, J |
| 出版日期 | 2008 |
| 会议名称 | 2nd conference on nanophotonics, nanostructure and nanometrology |
| 会议日期 | nov 12-14, 2007 |
| 会议地点 | beijing, peoples r china |
| 关键词 | measurement of microvibration nanometrology interferometry vibration detection |
| 页码 | 6831: 83118-83118 |
| 通讯作者 | zeng, hl, chinese acad sci, inst semicond, beijing 100864, peoples r china. |
| 中文摘要 | based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. suggestions were also given to consummate the system. the system also has resistance against the low frequency disturbance of the environment. |
| 英文摘要 | based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. suggestions were also given to consummate the system. the system also has resistance against the low frequency disturbance of the environment.; zhangdi于2010-03-09批量导入; made available in dspace on 2010-03-09t02:11:55z (gmt). no. of bitstreams: 1 683.pdf: 223348 bytes, checksum: 5de468dfbd4084297fa8f3d3c983db79 (md5) previous issue date: 2008; spie.; chinese opt soc.; [zeng, hualin; zhou, yan; fan, songtao; he, jun] chinese acad sci, inst semicond, beijing 100864, peoples r china |
| 收录类别 | CPCI-S |
| 会议主办者 | spie.; chinese opt soc. |
| 会议录 | nanophotonics,nanostructure,and nanometrology ii
 |
| 会议录出版者 | spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
| 学科主题 | 光电子学 |
| 会议录出版地 | 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
| 语种 | 英语 |
| ISSN号 | 0277-786x |
| ISBN号 | 978-0-8194-7006-5 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/7808]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Zeng, HL,Zhou, Y,Fan, ST,et al. Accurate vibration detection of a rough surface - art. no. 683118[C]. 见:2nd conference on nanophotonics, nanostructure and nanometrology. beijing, peoples r china. nov 12-14, 2007. |
入库方式： OAI收割
来源：半导体研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。