Simulation and fabrication of the SiC-based clamped-clamped filter
文献类型：会议论文
| 作者 | Zhao, YM ; Ning, J ; Sun, GS ; Liu, XF ; Wang, L ; Ji, G ; Wang, L ; Zhao, WS ; Li, JM ; Yang, FH |
| 出版日期 | 2008 |
| 会议名称 | 9th international conference on solid-state and integrated-circuit technology |
| 会议日期 | oct 20-23, 2008 |
| 会议地点 | beijing, peoples r china |
| 关键词 | MICROMECHANICAL RESONATORS FREQUENCY |
| 页码 | vols 1-4: 2524-2527 |
| 通讯作者 | zhao, ym, chinese acad sci, inst semicond, state key labs transducer technol, beijing 100083, peoples r china. |
| 中文摘要 | in this paper, the sic-based clamped-clamped filter was designed and fabricated. the filter was composed of two clamped-clamped beam micromechanical resonators coupled by a spring coupling beam. structural geometries, including the length and width of the resonator beam and coupling beam, were optimized by simulation for high frequency and high q, under the material properties of sic. the vibrating modes for the designed filter structure were analyzed by finite element analysis (fea) method. for the optimized structure, the geometries of resonator beams and coupling beams, as well as the coupling position, the sic-based clamped-clamped filter was fabricated by surface micromaching technology. |
| 英文摘要 | in this paper, the sic-based clamped-clamped filter was designed and fabricated. the filter was composed of two clamped-clamped beam micromechanical resonators coupled by a spring coupling beam. structural geometries, including the length and width of the resonator beam and coupling beam, were optimized by simulation for high frequency and high q, under the material properties of sic. the vibrating modes for the designed filter structure were analyzed by finite element analysis (fea) method. for the optimized structure, the geometries of resonator beams and coupling beams, as well as the coupling position, the sic-based clamped-clamped filter was fabricated by surface micromaching technology.; zhangdi于2010-03-09批量导入; made available in dspace on 2010-03-09t07:08:17z (gmt). no. of bitstreams: 1 292.pdf: 5072941 bytes, checksum: 143f24eb499fca6e4b5ad533e0ec9e3d (md5) previous issue date: 2008; ieee beijing sect.; chinese inst elect.; ieee electron devices soc.; ieee eds beijing chapter.; ieee solid state circuits soc.; ieee circuites & syst soc.; ieee hong kong eds, sscs chapter.; ieee sscs beijing chapter.; japan soc appl phys.; elect div ieee.; ursi commiss d.; inst elect engineers korea.; assoc asia pacific phys soc.; peking univ, ieee eds student chapter.; [zhao, yongmei; ning, jin; sun, guosheng; liu, xingfang; wang, liang; yang, fuhua] chinese acad sci, inst semicond, state key labs transducer technol, beijing 100083, peoples r china |
| 收录类别 | CPCI-S |
| 会议主办者 | ieee beijing sect.; chinese inst elect.; ieee electron devices soc.; ieee eds beijing chapter.; ieee solid state circuits soc.; ieee circuites & syst soc.; ieee hong kong eds, sscs chapter.; ieee sscs beijing chapter.; japan soc appl phys.; elect div ieee.; ursi commiss d.; inst elect engineers korea.; assoc asia pacific phys soc.; peking univ, ieee eds student chapter. |
| 会议录 | 2008 9th international conference on solid-state and integrated-circuit technology
 |
| 会议录出版者 | ieee ; 345 e 47th st, new york, ny 10017 usa |
| 学科主题 | 半导体材料 |
| 会议录出版地 | 345 e 47th st, new york, ny 10017 usa |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-2185-5 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8310]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Zhao, YM,Ning, J,Sun, GS,et al. Simulation and fabrication of the SiC-based clamped-clamped filter[C]. 见:9th international conference on solid-state and integrated-circuit technology. beijing, peoples r china. oct 20-23, 2008. |
入库方式： OAI收割
来源：半导体研究所
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