Multi channel micro neural probe fabricated with SOI
文献类型：会议论文
| 作者 | Wang SJ (Wang Shujing) ; Pei WH (Pei Weihua) ; Guo K (Guo Kai) ; Gui Q (Gui Qiang) ; Wang Y (Wang Yu) ; Zhang X (Zhang Xu) ; Tang J (Tang Jun) ; Chen HD (Chen Hongda) |
| 出版日期 | 2009 |
| 会议名称 | icme international conference on complex medical engineering |
| 会议日期 | apr 09-11, 2009 |
| 会议地点 | tempe, az |
| 关键词 | MICROELECTRODE ARRAYS |
| 页码 | 161-164 |
| 通讯作者 | pei, wh, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. |
| 中文摘要 | extracellular neural recording requires neural probes having more recording sites as well as limited volumes. with its mechanical characteristic and abundant process method, silicon is a kind of material fit for producing neural probe. silicon on insulator (soi) is adopted in this paper to fabricate neural probes. the uniformity and manufacturability are improved. the fabricating process and testing results of a series of multi channel micro neural probes were reported. the thickness of the probe is 15 mu m-30 mu m. the typical impedance characteristics of the record sites are around 2m omega at 1k hz. the performance of the neural probe in-vivo was tested on anesthetic rat. the recorded neural spike was typically around 140 mu v. spike recorded from individual site could exceed 700 mu v. the average signal noise ratio was 7 or more. |
| 英文摘要 | extracellular neural recording requires neural probes having more recording sites as well as limited volumes. with its mechanical characteristic and abundant process method, silicon is a kind of material fit for producing neural probe. silicon on insulator (soi) is adopted in this paper to fabricate neural probes. the uniformity and manufacturability are improved. the fabricating process and testing results of a series of multi channel micro neural probes were reported. the thickness of the probe is 15 mu m-30 mu m. the typical impedance characteristics of the record sites are around 2m omega at 1k hz. the performance of the neural probe in-vivo was tested on anesthetic rat. the recorded neural spike was typically around 140 mu v. spike recorded from individual site could exceed 700 mu v. the average signal noise ratio was 7 or more.; zhangdi于2010-03-09批量导入; zhangdi于2010-03-09批量导入; icme.; [wang, shujing; pei, weihua; guo, kai; gui, qiang; wang, yu; zhang, xu; tang, jun; chen, hongda] chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china |
| 收录类别 | 其他 |
| 会议主办者 | icme. |
| 会议录 | 2009 icme international conference on complex medical engineering
 |
| 会议录出版者 | ieee ; 345 e 47th st, new york, ny 10017 usa |
| 学科主题 | 人工智能 |
| 会议录出版地 | 345 e 47th st, new york, ny 10017 usa |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-3315-5 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/8364]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Wang SJ ,Pei WH ,Guo K ,et al. Multi channel micro neural probe fabricated with SOI[C]. 见:icme international conference on complex medical engineering. tempe, az. apr 09-11, 2009. |
入库方式： OAI收割
来源：半导体研究所
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