Influence of surface bow on reconstruction of 2-inch-SiC (0001) wafer
文献类型：期刊论文
| 作者 | Zhu MX(朱明星) ; Chen Y(陈义) ; Shi B(石彪) ; Liu XC(刘学超) ; Chang SH(常少辉) ; Yan CF(严成锋) ; Yang JH(杨建华) ; Shi EW(施尔畏) |
| 刊名 | JOURNAL OF APPLIED PHYSICS
 |
| 出版日期 | 2012-01-27 |
| 卷号 | 111页码:023516-1-023516-6 |
| ISSN号 | 0021-8979 |
| 其他题名 | Influence of surface bow on reconstruction of 2-inch-SiC (0001) wafer |
| 通讯作者 | 刘学超 |
| 中文摘要 | The step morphologies of a gas-etched 2-in. 6H-SiC (0001) wafer are investigated by the atomic force microscope. Due to the concave surface induced by bow, undulation surface morphologies were observed in the edge region. In the upside and downside region of the center along the <11-20> miscut direction, ripples and bimodal steps are observed, respectively. In the other edge regions, a complex pattern of waves enveloped in microsteps was formed. The complex reorganized surface morphology is discussed by the viewpoint of the two or three-dimensional phase separation. Compared to the regular unit cell high steps, the formalism of waved surface is interpreted by competing free energy curve through changes in surface structure faceting, where the step separated at a speci？c orientation and favor to match to surface reconstruction with unit cell high steps. |
| 学科主题 | 人工晶体 |
| 收录类别 | SCI收录 |
| 语种 | 英语 |
| 公开日期 | 2013-07-19 |
| 源URL | [http://ir.sic.ac.cn/handle/331005/3774]  |
| 专题 | 上海硅酸盐研究所_中试基地_期刊论文 |
| 推荐引用方式 GB/T 7714 | Zhu MX,Chen Y,Shi B,et al. Influence of surface bow on reconstruction of 2-inch-SiC (0001) wafer[J]. JOURNAL OF APPLIED PHYSICS,2012,111:023516-1-023516-6. |
| APA | 朱明星.,陈义.,石彪.,刘学超.,常少辉.,...&施尔畏.(2012).Influence of surface bow on reconstruction of 2-inch-SiC (0001) wafer.JOURNAL OF APPLIED PHYSICS,111,023516-1-023516-6. |
| MLA | 朱明星,et al."Influence of surface bow on reconstruction of 2-inch-SiC (0001) wafer".JOURNAL OF APPLIED PHYSICS 111(2012):023516-1-023516-6. |
入库方式： OAI收割
来源：上海硅酸盐研究所
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