Fabrication and characterization of two-dimensional photonic crystal on silicon by efficient methods
文献类型：会议论文
| 作者 | Xu XS (Xu Xingsheng) ; Wang CX (Wang Chunxia) ; Li F (Li Fang) ; Xiong GG (Xiong Guiguang) ; Liu YL (Liu Yuliang) ; Chen HD (Chen Hongda) |
| 出版日期 | 2006 |
| 会议名称 | 3rd international conference on group iv photonics |
| 会议日期 | sep 13-15, 2006 |
| 会议地点 | ottawa, canada |
| 关键词 | WAVE-GUIDE |
| 页码 | 69-71 |
| 通讯作者 | xu, xs, chinese acad sci, state key lab integrated optoelect, inst semicond, beijing 100083, peoples r china. |
| 中文摘要 | two-dimensional photonic crystals working in near infrared region are fabricated into silicon-on-insulator wafer by 248-nm deep uv lithography. we present an efficient way to measure the photonic crystal waveguide's light transmission spectra at given polarization states. |
| 英文摘要 | two-dimensional photonic crystals working in near infrared region are fabricated into silicon-on-insulator wafer by 248-nm deep uv lithography. we present an efficient way to measure the photonic crystal waveguide's light transmission spectra at given polarization states.; zhangdi于2010-03-29批量导入; zhangdi于2010-03-29批量导入; ieee.; chinese acad sci, state key lab integrated optoelect, inst semicond, beijing 100083, peoples r china |
| 收录类别 | 其他 |
| 会议主办者 | ieee. |
| 会议录 | 2006 3rd ieee international conference on group iv photonics
 |
| 会议录出版者 | ieee ; 345 e 47th st, new york, ny 10017 usa |
| 学科主题 | 光电子学 |
| 会议录出版地 | 345 e 47th st, new york, ny 10017 usa |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-0095-9 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/9774]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Xu XS ,Wang CX ,Li F ,et al. Fabrication and characterization of two-dimensional photonic crystal on silicon by efficient methods[C]. 见:3rd international conference on group iv photonics. ottawa, canada. sep 13-15, 2006. |
入库方式： OAI收割
来源：半导体研究所
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