Liquid nitrogen flowrate alarm system for MBE
文献类型：会议论文
| 作者 | Sun YW ; Li SY ; Ni HQ ; Xu Y ; Chen LH |
| 出版日期 | 2004 |
| 会议名称 | 5th international conference on thin film physics and applications |
| 会议日期 | may 31-jun 02, 2004 |
| 会议地点 | shanghai, peoples r china |
| 关键词 | liquid nitrogen(LN2) |
| 页码 | 5774: 423-425 |
| 通讯作者 | sun, yw, chinese acad sci, inst semicond, 912 po box, beijing 100083, peoples r china. |
| 中文摘要 | liquid nitrogen is very important for mbe system. most mbe systems use the liquid nitrogen to absorb the impurity molecules. if mbe cryoshroud is lack of liquid nitrogen, the pressure of the growth chamber will grow. this will affect the film quality. but too much liquid nitrogen is a waste. we have developed a liquid nitrogen flowrate alarm system to monitor the liquid nitrogen status in mbe cryoshroud. in this method, a temperature sensor is placed at the end of the cryoshroud. the temperature varies with changing of the liquid nitrogen status in cryoshroud. if the liquid nitrogen level in the cryoshroud is too low or too high, the lnfa will send out an alarm to warn the user to adjust the liquid nitrogen flowrate. in our experiments, we found this method works well, and the temperature responds sensitively. with the help of this system, people can view the liquid nitrogen status of the entire growth process. compare with other method. it is very cheap. |
| 英文摘要 | liquid nitrogen is very important for mbe system. most mbe systems use the liquid nitrogen to absorb the impurity molecules. if mbe cryoshroud is lack of liquid nitrogen, the pressure of the growth chamber will grow. this will affect the film quality. but too much liquid nitrogen is a waste. we have developed a liquid nitrogen flowrate alarm system to monitor the liquid nitrogen status in mbe cryoshroud. in this method, a temperature sensor is placed at the end of the cryoshroud. the temperature varies with changing of the liquid nitrogen status in cryoshroud. if the liquid nitrogen level in the cryoshroud is too low or too high, the lnfa will send out an alarm to warn the user to adjust the liquid nitrogen flowrate. in our experiments, we found this method works well, and the temperature responds sensitively. with the help of this system, people can view the liquid nitrogen status of the entire growth process. compare with other method. it is very cheap.; zhangdi于2010-03-29批量导入; zhangdi于2010-03-29批量导入; chinese phys soc.; shanghai phys soc.; natl nat sci fdn china.; e china normal univ, sch informat sci & technol.; fudan univ, appl surface phys lab.; natl lab infrared phys.; cas, shanghai inst tech phys.; e china normal univ, key lab opt & magnet resonance spectroscopy.; chinese acad sci, inst semicond, beijing 100083, peoples r china |
| 收录类别 | 其他 |
| 会议主办者 | chinese phys soc.; shanghai phys soc.; natl nat sci fdn china.; e china normal univ, sch informat sci & technol.; fudan univ, appl surface phys lab.; natl lab infrared phys.; cas, shanghai inst tech phys.; e china normal univ, key lab opt & magnet resonance spectroscopy. |
| 会议录 | fifth international conference on thin film physics and applications丛书标题: proceedings of the society of photo-optical instrumentation engineers (spie)
 |
| 会议录出版者 | spie-int soc optical engineering ; 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
| 学科主题 | 半导体材料 |
| 会议录出版地 | 1000 20th st, po box 10, bellingham, wa 98227-0010 usa |
| 语种 | 英语 |
| ISSN号 | 0277-786x |
| ISBN号 | 0-8194-5755-8 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/10066]  |
| 专题 | 半导体研究所_中国科学院半导体研究所（2009年前） |
| 推荐引用方式 GB/T 7714 | Sun YW,Li SY,Ni HQ,et al. Liquid nitrogen flowrate alarm system for MBE[C]. 见:5th international conference on thin film physics and applications. shanghai, peoples r china. may 31-jun 02, 2004. |
入库方式： OAI收割
来源：半导体研究所
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