Effects of annealing treatment on the formation of CO2 in ZnO thin films grown by metal-organic chemical vapor deposition
文献类型：期刊论文
| 作者 | Wei HY ; Jia CH; Jiao CM; Song HP
|
| 刊名 | applied surface science
 |
| 出版日期 | 2010 |
| 卷号 | 256期号:8页码:2606-2610 |
| 关键词 | ZnO Metal-organic chemical vapor deposition Infrared absorption Surface RAY PHOTOELECTRON-SPECTROSCOPY POLAR-SURFACE EPITAXY |
| 通讯作者 | zheng, gl, chinese acad sci, inst semicond, key lab semicond mat sci, pob 912, beijing 100083, peoples r china. e-mail address: zhenggl@semi.ac.cn ; xlliu@semi.ac.cn |
| 合作状况 | 其它 |
| 英文摘要 | post-growth annealing was carried out on zno thin films grown by metal-organic chemical vapor deposition (mocvd). the grain size of zno thin film increases monotonically with annealing temperature. the zno thin films were preferential to c-axis oriented after annealing as confirmed by xray diffraction (xrd) measurements. fourier transformation infrared transmission measurements showed that zno films grown at low temperature contains co2 molecules after post-growth annealing. a two-step reaction process has been proposed to explain the formation mechanism of co2, which indicates the possible chemical reaction processes during the metal-organic chemical vapor deposition of zno films.; submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-04-04t15:27:50z no. of bitstreams: 1 62.pdf: 705858 bytes, checksum: e055729a714051da89f335dea5fea04c (md5); approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-04-04t15:33:57z (gmt) no. of bitstreams: 1 62.pdf: 705858 bytes, checksum: e055729a714051da89f335dea5fea04c (md5); made available in dspace on 2010-04-04t15:33:57z (gmt). no. of bitstreams: 1 62.pdf: 705858 bytes, checksum: e055729a714051da89f335dea5fea04c (md5) previous issue date: 2010; national science foundation of china 60776015 60976008; special funds for major state basic research project (973 program) of china 2006cb604907; 863 high technology r&d program of china 2007aa03z402 2007aa03z451; 其它 |
| 学科主题 | 半导体材料 |
| 收录类别 | SCI |
| 资助信息 | national science foundation of china 60776015 60976008; special funds for major state basic research project (973 program) of china 2006cb604907; 863 high technology r&d program of china 2007aa03z402 2007aa03z451 |
| 语种 | 英语 |
| 公开日期 | 2010-04-04 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/10206]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Wei HY,Jia CH,Jiao CM,et al. Effects of annealing treatment on the formation of CO2 in ZnO thin films grown by metal-organic chemical vapor deposition[J]. applied surface science,2010,256(8):2606-2610. |
| APA | Wei HY,Jia CH,Jiao CM,&Song HP.(2010).Effects of annealing treatment on the formation of CO2 in ZnO thin films grown by metal-organic chemical vapor deposition.applied surface science,256(8),2606-2610. |
| MLA | Wei HY,et al."Effects of annealing treatment on the formation of CO2 in ZnO thin films grown by metal-organic chemical vapor deposition".applied surface science 256.8(2010):2606-2610. |
入库方式： OAI收割
来源：半导体研究所
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