Effects of Hydrogen Plasma Treatment on the Electrical and Optical Properties of ZnO Films: Identification of Hydrogen Donors in ZnO
文献类型：期刊论文
| 作者 | Dong JJ (Dong J. J.) ; Zhang XW (Zhang X. W.) ; You JB (You J. B.) ; Cai PF (Cai P. F.) ; Yin ZG (Yin Z. G.) ; An Q (An Q.) ; Ma XB (Ma X. B.) ; Jin P (Jin P.) ; Wang ZG (Wang Z. G.) ; Chu PK (Chu Paul K.) |
| 刊名 | acs applied materials & interfaces
 |
| 出版日期 | 2010 |
| 卷号 | 2期号:6页码:1780-1784 |
| 关键词 | hydrogen plasma treatment zinc oxide Raman spectroscopy photoluminescence RAMAN-SCATTERING IMPLANTED ZNO THIN-FILMS DENSITY |
| 通讯作者 | zhang, xw, chinese acad sci, inst semicond, key lab semicond mat sci, beijing 100083, peoples r china. e-mail address: xwzhang@semi.ac.cn |
| 合作状况 | 国际 |
| 英文摘要 | wurtzite zno has many potential applications in optoelectronic devices, and the hydrogenated zno exhibits excellent photoelectronic properties compared to undoped zno; however, the structure of h-related defects is still unclear. in this article, the effects of hydrogen-plasma treatment and subsequent annealing on the electrical and optical properties of zno films were investigated by a combination of hall measurement, raman scattering, and photoluminescence. it is found that two types of hydrogen-related defects, namely, the interstitial hydrogen located at the bond-centered (h-bc) and the hydrogen trapped at a o vacancy (h-o), are responsible for the n-type background conductivity of zno films. besides introducing two hydrogen-related donor states, the incorporated hydrogen passivates defects at grain boundaries. with increasing annealing temperatures, the unstable h-bc atoms gradually diffuse out of the zno films and part of them are converted into h-o, which gives rise to two anomalous raman peaks at 275 and 510 cm(-1). these results help to clarify the relationship between the hydrogen-related defects in zno described in various studies and the free carriers that are produced by the introduction of hydrogen.; submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-07-05t07:27:53z no. of bitstreams: 1 effects of hydrogen plasma treatment on the electrical and optical properties of zno films identification of hydrogen donors in zno.pdf: 560455 bytes, checksum: 7ddb717d791c801ff6ba5a26b17910d5 (md5); approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-07-05t07:43:20z (gmt) no. of bitstreams: 1 effects of hydrogen plasma treatment on the electrical and optical properties of zno films identification of hydrogen donors in zno.pdf: 560455 bytes, checksum: 7ddb717d791c801ff6ba5a26b17910d5 (md5); made available in dspace on 2010-07-05t07:43:20z (gmt). no. of bitstreams: 1 effects of hydrogen plasma treatment on the electrical and optical properties of zno films identification of hydrogen donors in zno.pdf: 560455 bytes, checksum: 7ddb717d791c801ff6ba5a26b17910d5 (md5) previous issue date: 2010; this work was financially supported by the "863" project of china (grant 2009aa03z305), the national natural science foundation of china (grant 60876031, 60806044), the national basic research program of china (grant 2010cb933800), and hong kong research grants council (rgc) general research funds (grf) cityu 112608.; 国际 |
| 学科主题 | 半导体材料 |
| 资助信息 | this work was financially supported by the "863" project of china (grant 2009aa03z305), the national natural science foundation of china (grant 60876031, 60806044), the national basic research program of china (grant 2010cb933800), and hong kong research grants council (rgc) general research funds (grf) cityu 112608. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-07-05 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/11354]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Dong JJ ,Zhang XW ,You JB ,et al. Effects of Hydrogen Plasma Treatment on the Electrical and Optical Properties of ZnO Films: Identification of Hydrogen Donors in ZnO[J]. acs applied materials & interfaces,2010,2(6):1780-1784. |
| APA | Dong JJ .,Zhang XW .,You JB .,Cai PF .,Yin ZG .,...&Chu PK .(2010).Effects of Hydrogen Plasma Treatment on the Electrical and Optical Properties of ZnO Films: Identification of Hydrogen Donors in ZnO.acs applied materials & interfaces,2(6),1780-1784. |
| MLA | Dong JJ ,et al."Effects of Hydrogen Plasma Treatment on the Electrical and Optical Properties of ZnO Films: Identification of Hydrogen Donors in ZnO".acs applied materials & interfaces 2.6(2010):1780-1784. |
入库方式： OAI收割
来源：半导体研究所
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