Characterization and analysis of two-dimensional GaAs-based photonic crystal nanocavities at room temperature
文献类型：期刊论文
| 作者 | Peng YS (Peng Y. S.) ; Xu B (Xu B.) ; Ye XL (Ye X. L.) ; Niu JB (Niu J. B.) ; Jia R (Jia R.) ; Wang ZG (Wang Z. G.) |
| 刊名 | microelectronic engineering
 |
| 出版日期 | 2010 |
| 卷号 | 87期号:10页码:1834-1837 |
| 关键词 | Photonic crystal nanocavities Quantum dots Cavity resonant mode Room temperature |
| 通讯作者 | peng, ys, chinese acad sci, inst semicond, key lab semicond mat sci, beijing 100083, peoples r china. 电子邮箱地址: cynthia@semi.ac.cn |
| 合作状况 | 国内 |
| 英文摘要 | this paper describes the design and fabrication process of a two-dimensional gaas-based photonic crystal nanocavity and analyzes the optical characterization of cavity modes at room temperature. single inas/ingaas quantum dots (qds) layer was embedded in a gaas waveguide layer grown on an al0.7ga0.3as layer and gaas substrate. the patterning of the structure and the membrane release were achieved by using electron-beam lithography, reaction ion etching, inductively coupled plasma etching and selective wet etching. the micro-luminescence spectrum is recorded from the fabricated nanocavities, and it is found that some high-order cavity modes are clearly observed besides the lowest-order resonant mode is exhibited in spite of much high rate of nonradiative recombination. the variance of resonant modes is also discussed as a function of r/a ratio and will be used in techniques aimed to improve the probability of achieving spectral coupling of a single qd to a cavity mode.; submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-08-17t02:08:57z no. of bitstreams: 1 characterization and analysis of two-dimensional gaas-based photonic crystal nanocavities at room temperature.pdf: 310672 bytes, checksum: 9c5a6ecb28ffb83b5fc6f91d37236cda (md5); approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-08-17t02:27:30z (gmt) no. of bitstreams: 1 characterization and analysis of two-dimensional gaas-based photonic crystal nanocavities at room temperature.pdf: 310672 bytes, checksum: 9c5a6ecb28ffb83b5fc6f91d37236cda (md5); made available in dspace on 2010-08-17t02:27:30z (gmt). no. of bitstreams: 1 characterization and analysis of two-dimensional gaas-based photonic crystal nanocavities at room temperature.pdf: 310672 bytes, checksum: 9c5a6ecb28ffb83b5fc6f91d37236cda (md5) previous issue date: 2010; this research is supported by the 973 program of china (grant nos. 2006cb604904 and 2006cb604908) and the national nature science foundation of china (grant nos. 60676029, 60990315 and 60625402). the authors are sincerely grateful to drs. zhong-chao fan at engineering research center of semiconductor integrated technology, institute of semiconductors, chinese academy of science, and drs. junjie li at laboratory of micro-fabrication, institute of physics, chinese academy of science, for valuable discussions, and to mrs. ying hu and mrs. pin liang for their help and encouragement throughout the course of work.; 国内 |
| 学科主题 | 半导体材料 |
| 资助信息 | this research is supported by the 973 program of china (grant nos. 2006cb604904 and 2006cb604908) and the national nature science foundation of china (grant nos. 60676029, 60990315 and 60625402). the authors are sincerely grateful to drs. zhong-chao fan at engineering research center of semiconductor integrated technology, institute of semiconductors, chinese academy of science, and drs. junjie li at laboratory of micro-fabrication, institute of physics, chinese academy of science, for valuable discussions, and to mrs. ying hu and mrs. pin liang for their help and encouragement throughout the course of work. |
| 收录类别 | SCI |
| 语种 | 英语 |
| 公开日期 | 2010-08-17 |
| 源URL | [http://ir.semi.ac.cn/handle/172111/13488]  |
| 专题 | 半导体研究所_中科院半导体材料科学重点实验室 |
| 推荐引用方式 GB/T 7714 | Peng YS ,Xu B ,Ye XL ,et al. Characterization and analysis of two-dimensional GaAs-based photonic crystal nanocavities at room temperature[J]. microelectronic engineering,2010,87(10):1834-1837. |
| APA | Peng YS ,Xu B ,Ye XL ,Niu JB ,Jia R ,&Wang ZG .(2010).Characterization and analysis of two-dimensional GaAs-based photonic crystal nanocavities at room temperature.microelectronic engineering,87(10),1834-1837. |
| MLA | Peng YS ,et al."Characterization and analysis of two-dimensional GaAs-based photonic crystal nanocavities at room temperature".microelectronic engineering 87.10(2010):1834-1837. |
入库方式： OAI收割
来源：半导体研究所
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