Preparation of diamond films with controllable surface morphology, orientation and quality in an overmoded microwave plasma CVD chamber
文献类型：期刊论文
| 作者 | J. Weng ; J.H. Wang ; S.Y. Dai ; L.W. Xiong ; W.D. Man ; F. Liu |
| 刊名 | applied surface science
 |
| 出版日期 | 2013 |
| 卷号 | 276 |
| 学科主题 | 等离子体物理 |
| 公开日期 | 2013-08-14 |
| 源URL | [http://ir.hfcas.ac.cn/handle/334002/10256]  |
| 专题 | 合肥物质科学研究院_中科院等离子体物理研究所 |
| 推荐引用方式 GB/T 7714 | J. Weng,J.H. Wang,S.Y. Dai,et al. Preparation of diamond films with controllable surface morphology, orientation and quality in an overmoded microwave plasma CVD chamber[J]. applied surface science,2013,276. |
| APA | J. Weng,J.H. Wang,S.Y. Dai,L.W. Xiong,W.D. Man,&F. Liu.(2013).Preparation of diamond films with controllable surface morphology, orientation and quality in an overmoded microwave plasma CVD chamber.applied surface science,276. |
| MLA | J. Weng,et al."Preparation of diamond films with controllable surface morphology, orientation and quality in an overmoded microwave plasma CVD chamber".applied surface science 276(2013). |
入库方式： OAI收割
来源：合肥物质科学研究院
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