Characteristic of the carbon–tungsten co-deposition layers prepared by RF magnetron sputtering in a D2/Ar plasma
文献类型：期刊论文
| 作者 | X.H. Tang ; W.Z. Zhang ; L.Q. Shi ; Q. Qi ; B. Zhang ; W.Y. Zhang ; K. Wang ; J.S. Hu |
| 刊名 | Nuclear Instruments and Methods in Physics Research B
 |
| 出版日期 | 2013 |
| 卷号 | 305 |
| 学科主题 | 等离子体物理 |
| 公开日期 | 2013-08-14 |
| 源URL | [http://ir.hfcas.ac.cn/handle/334002/10259]  |
| 专题 | 合肥物质科学研究院_中科院等离子体物理研究所 |
| 推荐引用方式 GB/T 7714 | X.H. Tang,W.Z. Zhang,L.Q. Shi,et al. Characteristic of the carbon–tungsten co-deposition layers prepared by RF magnetron sputtering in a D2/Ar plasma[J]. Nuclear Instruments and Methods in Physics Research B,2013,305. |
| APA | X.H. Tang.,W.Z. Zhang.,L.Q. Shi.,Q. Qi.,B. Zhang.,...&J.S. Hu.(2013).Characteristic of the carbon–tungsten co-deposition layers prepared by RF magnetron sputtering in a D2/Ar plasma.Nuclear Instruments and Methods in Physics Research B,305. |
| MLA | X.H. Tang,et al."Characteristic of the carbon–tungsten co-deposition layers prepared by RF magnetron sputtering in a D2/Ar plasma".Nuclear Instruments and Methods in Physics Research B 305(2013). |
入库方式： OAI收割
来源：合肥物质科学研究院
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