中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Method for manufacturing semiconducter laser diode

文献类型:专利

作者KWAK, JOON-SEOP
专利号US20020048835A1
著作权人SAMSUNG ELECTRONICS CO., LTD.
国家美国
文献子类发明申请
其他题名Method for manufacturing semiconducter laser diode
英文摘要A method for manufacturing a semiconductor laser diode is described. The method for manufacturing a semiconductor laser diode includes sequentially forming a buffer layer, a first clad layer, a first waveguide layer, an active layer, a second waveguide layer, a second clad layer, and a cap layer on a substrate, patterning the cap layer, and patterning the second clad layer as a ridge structure by making the patterned cap layer as an upper layer, selectively forming a passivation layer for covering the second clad layer patterned as the ridge structure around the cap layer, and forming an electrode in contact with the cap layer on the passivation layer.
公开日期2002-04-25
申请日期2001-08-10
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/43418]  
专题半导体激光器专利数据库
作者单位SAMSUNG ELECTRONICS CO., LTD.
推荐引用方式
GB/T 7714
KWAK, JOON-SEOP. Method for manufacturing semiconducter laser diode. US20020048835A1.

入库方式: OAI收割

来源:西安光学精密机械研究所

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