Method for fabricating optical devices with defectless and antireflecting spot size converter
文献类型：专利
| 作者 | KIM, SUNG BOCK; OH, DAE KON |
| 专利号 | US20020151095A1 |
| 著作权人 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Method for fabricating optical devices with defectless and antireflecting spot size converter |
| 英文摘要 | The present invention relates to a method for fabricating an optical device integrated with a spot size converter to reduce defect and low reflectivity in a butt-joint portion, the method including the steps of: a) depositing a first clad layer, an active layer and a second clad layer sequentially on the (100) plane of a semiconductor substrate; b) forming on the second clad layer a double dielectric mask of which the lower layer has a relatively wider width than that of the upper layer, exposing one side of the second clad layer; c) wet-etching the first clad layer, the active layer and the second clad layer in a buried ridge structure by using the double dielectric mask, and exposing the (111)A plane of the active layer tilted towards the (100) plane by a predetermined angle; d) growing a spot size conversion region on the (111)A plane of the active layer; and e) removing the double dielectric mask. |
| 公开日期 | 2002-10-17 |
| 申请日期 | 2002-03-04 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/43426]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 推荐引用方式 GB/T 7714 | KIM, SUNG BOCK,OH, DAE KON. Method for fabricating optical devices with defectless and antireflecting spot size converter. US20020151095A1. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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