中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Optical device and manufacturing method thereof

文献类型:专利

作者KADOTA, MICHIO
专利号US20030045014A1
著作权人MURATA MANUFACTURING CO., LTD.
国家美国
文献子类发明申请
其他题名Optical device and manufacturing method thereof
英文摘要An optical device includes a substrate, dielectric layers disposed on portions of the substrate, and a piezoelectric layer disposed over the substrate and the dielectric layer, wherein the piezoelectric layer functions as a waveguide in which incident light is transmitted parallel to the surface of the piezoelectric layer. The piezoelectric layer has first piezoelectric layer regions each having an axis orientation directed to a first direction depending on the substrate and second piezoelectric layer regions each having an axis orientation directed to a second direction depending on the dielectric layers, and each of the first piezoelectric layer regions and each of the second piezoelectric layer regions are adjacent. A method manufacturing an optical device includes the steps of forming dielectric layers on portions of a substrate, and forming a piezoelectric layer over the dielectric layers and the substrate.
公开日期2003-03-06
申请日期2002-08-05
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/43440]  
专题半导体激光器专利数据库
作者单位MURATA MANUFACTURING CO., LTD.
推荐引用方式
GB/T 7714
KADOTA, MICHIO. Optical device and manufacturing method thereof. US20030045014A1.

入库方式: OAI收割

来源:西安光学精密机械研究所

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