Process for fabrication of optical waveguides
文献类型：专利
| 作者 | ZHANG, JUN-YING; GATES, BRIAN J.; LARSEN, JEREMY K.; KOCH, BARRY J.; SMITH, TERRY L. |
| 专利号 | US20030176002A1 |
| 著作权人 | 3M INNOVATIVE PROPERTIES COMPANY |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Process for fabrication of optical waveguides |
| 英文摘要 | A method for manufacturing an optical waveguide device in accordance with the present invention includes the steps of depositing a lower cladding layer; coating a photoresist layer directly on the lower cladding layer; patterning the photoresist layer to create channels; depositing a core layer, wherein a first portion of the core layer is deposited inside the channels and a second portion overlays the patterned photoresist layer; removing the patterned photoresist layer and the second portions of the core layer overlaying the patterned photoresist layer; and depositing an upper cladding layer. |
| 公开日期 | 2003-09-18 |
| 申请日期 | 2002-12-24 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/43447]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | 3M INNOVATIVE PROPERTIES COMPANY |
| 推荐引用方式 GB/T 7714 | ZHANG, JUN-YING,GATES, BRIAN J.,LARSEN, JEREMY K.,et al. Process for fabrication of optical waveguides. US20030176002A1. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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