Semiconductor devices based on coalesced nano-rod arrays
文献类型：专利
| 作者 | MISHRA, UMESH KUMAR; KELLER, STACIA |
| 专利号 | US20060223211A1 |
| 著作权人 | REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE |
| 国家 | 美国 |
| 文献子类 | 发明申请 |
| 其他题名 | Semiconductor devices based on coalesced nano-rod arrays |
| 英文摘要 | Semiconductor devices are fabricated using semiconductor nano-rod arrays, which are merged through coalescence into a continuous planar layer after the nano-rods in the nano-rod array are fabricated by growth or etching. Merging of the nano-rods through coalescence into a continuous layer is achieved by tuning the growth conditions into a regime allowing epitaxial lateral overgrowth. |
| 公开日期 | 2006-10-05 |
| 申请日期 | 2005-12-02 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/43520]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | REGENTS OF THE UNIVERSITY OF CALIFORNIA, THE |
| 推荐引用方式 GB/T 7714 | MISHRA, UMESH KUMAR,KELLER, STACIA. Semiconductor devices based on coalesced nano-rod arrays. US20060223211A1. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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