中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Nitride semiconductor light-emitting device and method for producing same

文献类型:专利

作者TAKAKURA, TERUYOSHI; ITO, SHIGETOSHI; KAMIKAWA, TAKESHI
专利号US20060131590A1
著作权人SHARP KABUSHIKI KAISHA
国家美国
文献子类发明申请
其他题名Nitride semiconductor light-emitting device and method for producing same
英文摘要In a method for producing a nitride semiconductor light-emitting device according to the present invention, first, a nitride semiconductor substrate having groove portions formed is prepared. An underlying layer comprising nitride semiconductor is formed on the nitride semiconductor substrate including the side walls of the groove portions, in such a manner that the underlying layer has a crystal surface in each of the groove portions and the crystal surface is tilted at an angle of from 53.5° to 63.4° with respect to the surface of the substrate. Over the underlying layer, a light-emitting-device structure composed of a lower cladding layer containing Al, an active layer, and an upper cladding layer containing Al is formed. According to the present invention, thickness nonuniformity and lack of surface flatness, which occur when accumulating a layer with light-emitting-device structure of nitride semiconductor over the nitride semiconductor substrate, are alleviated while inhibiting occurrence of cracking.
公开日期2006-06-22
申请日期2005-12-08
状态授权
源URL[http://ir.opt.ac.cn/handle/181661/43521]  
专题半导体激光器专利数据库
作者单位SHARP KABUSHIKI KAISHA
推荐引用方式
GB/T 7714
TAKAKURA, TERUYOSHI,ITO, SHIGETOSHI,KAMIKAWA, TAKESHI. Nitride semiconductor light-emitting device and method for producing same. US20060131590A1.

入库方式: OAI收割

来源:西安光学精密机械研究所

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