中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof

文献类型:专利

作者BLAUVELT, HENRY A.; VEMOOY, DAVID W.; PASLASKI, JOEL S.; GROSJEAN, CHARLES I.; LEE, HAO; MONZON, FRANKLIN G.; NGUYEN, KATRINA H.
专利号US20090304326A1
著作权人HUAWEI TECHNOLOGIES CO., LTD.
国家美国
文献子类发明申请
其他题名Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof
英文摘要An optical apparatus comprises: a semiconductor substrate; a semiconductor optical device integrally formed on the substrate and having an off-normal device end face; and a low-index planar optical waveguide integrally formed on the semiconductor substrate at the device end face. The device and waveguide are non-collinear, and the waveguide is end-coupled at its proximal end to the optical device by refraction at the device end face. The apparatus further includes a reflective coating between the waveguide and substrate, an etched end face curved in the horizontal dimension, or an etched end face with a lower portion that protrudes beneath a proximal portion of the waveguide.
公开日期2009-12-10
申请日期2009-08-15
状态授权
源URL[http://ir.opt.ac.cn/handle/181661/43586]  
专题半导体激光器专利数据库
作者单位HUAWEI TECHNOLOGIES CO., LTD.
推荐引用方式
GB/T 7714
BLAUVELT, HENRY A.,VEMOOY, DAVID W.,PASLASKI, JOEL S.,et al. Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof. US20090304326A1.

入库方式: OAI收割

来源:西安光学精密机械研究所

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