中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Fabricating method of semiconductor laser and semiconductor and semiconductor laser

文献类型:专利

作者HWANG, SUN-LYEONG; PARK, BYEONG-HOON
专利号US20060159133A1
著作权人SAMSUNG ELECTRONICS CO. ; LTD.
国家美国
文献子类发明申请
其他题名Fabricating method of semiconductor laser and semiconductor and semiconductor laser
英文摘要A method for manufacturing a semiconductor laser is provided. The method includes the steps of sequentially growing a lower clad, a lower waveguide and a multi-quantum well on a semiconductor substrate; forming, on the multi-quantum well, masks each possessing a first area which has a constant width and a second area which extends from the first area and has a gradually decreasing width, such that the masks are symmetrical to each other; sequentially growing an upper waveguide and an upper clad on the multi-quantum well through selective area growth; implementing a mesa-etching process from the upper clad to the lower clad; and growing, on the semiconductor substrate, a current blocking layer to have the same height as the upper clad.
公开日期2006-07-20
申请日期2005-07-29
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/43850]  
专题半导体激光器专利数据库
作者单位1.SAMSUNG ELECTRONICS CO.
2.LTD.
推荐引用方式
GB/T 7714
HWANG, SUN-LYEONG,PARK, BYEONG-HOON. Fabricating method of semiconductor laser and semiconductor and semiconductor laser. US20060159133A1.

入库方式: OAI收割

来源:西安光学精密机械研究所

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