Manufacture of optical integrated circuit
文献类型：专利
| 作者 | NAGANUMA MITSURU; KASATANI KAZUO; OKAMOTO MINORU |
| 专利号 | JP1992369269A |
| 著作权人 | NIPPON TELEGR & TELEPH CORP |
| 国家 | 日本 |
| 文献子类 | 发明申请 |
| 其他题名 | Manufacture of optical integrated circuit |
| 英文摘要 | PURPOSE:To realize a butting junction having extremely small reflections and, scattering without regrowth. CONSTITUTION:A basic mask is formed with two stripelike insulating films 5 disposed in parallel as one set as a selective growth mask, including at least one layer of a quantum well structure in the selectively eptiaxially grown layer in a selectively epitaxial growth to be conducted on a semiconductor substrate 4 in which the mask is formed of an insulating film, and a combination of the mask and a region 7 having no selectively grown mask, is used. |
| 公开日期 | 1992-12-22 |
| 申请日期 | 1991-06-17 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/43861]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | NIPPON TELEGR & TELEPH CORP |
| 推荐引用方式 GB/T 7714 | NAGANUMA MITSURU,KASATANI KAZUO,OKAMOTO MINORU. Manufacture of optical integrated circuit. JP1992369269A. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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