中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Distribution feedback type semiconductor and its manufacture method

文献类型:专利

作者KITAMURA MITSUHIRO; YAMADA HIROHITO; SASAKI YOSHIHIRO; SASAKI TATSUYA
专利号JP1991062985A
著作权人日本電気株式会社
国家日本
文献子类发明申请
其他题名Distribution feedback type semiconductor and its manufacture method
英文摘要PURPOSE:To obtain a high-performance distribution feedback type semiconductor laser with a high productivity and reproducibility by forming an ultra-grid buffer consisting of a semiconductor multilayer thin film between an active layer and a waveguide layer. CONSTITUTION:An Si doped n-type InGaAsP waveguide layer 3 of a light- emitting wavelength of 3mum, InP, each 20Angstrom of InGaAsP of 3mum composition, an ultra-grid buffer layer 4 consisting of five layers, indoped InGaAsP barrier layer of a wavelength of 3mum composition and a quantum well active layer 5 consisting of a non-doped InGaAs quantum well layer 4, and an Zn dope p-type InP clad layer 6 are laminated in sequence. The depth of diffraction grid after growth should be approximately 350Angstrom , the thickness of the waveguide layer 3 should be 1500Angstrom , and total thickness of the ultra-grid buffer layer 4 should be 200Angstrom . Thus, distortion of crystal generated at the waveguide layer can be effectively absorbed by the ultra-grid buffer layer and a waveguide layer can be formed by a plurality of semiconductor layers with different compositions.
公开日期1991-03-19
申请日期1989-07-31
状态失效
源URL[http://ir.opt.ac.cn/handle/181661/44040]  
专题半导体激光器专利数据库
作者单位日本電気株式会社
推荐引用方式
GB/T 7714
KITAMURA MITSUHIRO,YAMADA HIROHITO,SASAKI YOSHIHIRO,et al. Distribution feedback type semiconductor and its manufacture method. JP1991062985A.

入库方式: OAI收割

来源:西安光学精密机械研究所

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