Preservation of surface features on semiconductor surfaces
文献类型：专利
| 作者 | WILT, DANIEL P. |
| 发表日期 | 1989-02-14 |
| 专利号 | US4805178 |
| 著作权人 | BELL TELEPHONE LABORATORIES, INCORPORATED |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Preservation of surface features on semiconductor surfaces |
| 英文摘要 | The integrity of surface structural features (e.g., distributed feedback gratings) in Group III-V compound semiconductors are preserved during heating (e.g., subsequent LPE regrowth) by a thin coating containing a transition metal (e.g., Os, Ru and Rh). DFB-DCPBH InP/InGaAsP single frequency lasers made in this way are also described. |
| 公开日期 | 1989-02-14 |
| 申请日期 | 1986-03-28 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/44400]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | BELL TELEPHONE LABORATORIES, INCORPORATED |
| 推荐引用方式 GB/T 7714 | WILT, DANIEL P.. Preservation of surface features on semiconductor surfaces. US4805178. 1989-02-14. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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