Method for producing various semiconductor optical devices of differing optical characteristics
文献类型:专利
作者 | NAKAO, MASASHI; KONDOU, YASUHIRO; OKAYASU, MASANOBU; NAGANUMA, MITSURU; SUZUKI, YASUHIRO; YUDA, MASAHIRO; MITOMI, OSAMU; KASAYA, KAZUO; NAKANO, JUNICHI; YOKOYAMA, KIYOYUKI |
发表日期 | 1996-12-17 |
专利号 | US5585957 |
著作权人 | NIPPON TELEGRAPH AND TELEPHONE CORPORATION |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Method for producing various semiconductor optical devices of differing optical characteristics |
英文摘要 | An optical functional device includes a semiconductor substrate, an optical functional layer provided on said semiconductor substrate and selected from the group consisting of a light emitting layer, a light absorbing layer, and an optical waveguide layer. The optical functional layer has a multi-quantum well layer. Preferably, the semiconductor substrate is a nonplanar semiconductor substrate having a ridge and two grooves adjacent said ridge, said ridge having a ridge width of from 1 to 10 mu m, a ridge height of from 1 mu m to 5 mu m, and a gap distance of from 1 mu m to 10 mu m. Such an optical functional device can be fabricated by growing, on a nonplanar semiconductor substrate having a specified dimension of the ridge, a strained multi-quantum well layer by metalorganic vapor phase epitaxy. Integrated optical device or circuit preferably includes an optical functional device on the nonplanar semiconductor substrate of a specified range of ridge shape factors. An integrated optical device can be fabricated by combination of a plurality of optical functional devices having slightly different compositions and including a part of a strained multi-quantum well layer monolithically grown on a nonplanar semiconductor substrate. |
公开日期 | 1996-12-17 |
申请日期 | 1994-03-23 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/44413] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | NIPPON TELEGRAPH AND TELEPHONE CORPORATION |
推荐引用方式 GB/T 7714 | NAKAO, MASASHI,KONDOU, YASUHIRO,OKAYASU, MASANOBU,et al. Method for producing various semiconductor optical devices of differing optical characteristics. US5585957. 1996-12-17. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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