Method for preventing facet coating overspray
文献类型：专利
| 作者 | RIZZO, JOHN S.; DERKITS, JR., GUSTAV EDWARD; GRUSZKA, RAYMOND FRANK; BOYD, JOHN E. |
| 发表日期 | 1999-11-23 |
| 专利号 | US5989637 |
| 著作权人 | AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method for preventing facet coating overspray |
| 英文摘要 | A method and apparatus for preventing overspray onto bonding pads of a laser bar during facet coating includes manufacturing inserts with gaskets that are aligned with the laser bar such that the gaskets mask off the bonding pads during the facet coating process so that no overspray onto the bonding pads occurs. The gaskets are preferably made of gold with a thin titanium coating to prevent thermal compression bonding with the bonding pads. The inserts with gaskets are preferably manufactured using standard wafer processing techniques. The gaskets are preferably formed using the compliant layer metalization process described in U.S. Pat. No. 5,559,817. |
| 公开日期 | 1999-11-23 |
| 申请日期 | 1998-04-16 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/44489]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED |
| 推荐引用方式 GB/T 7714 | RIZZO, JOHN S.,DERKITS, JR., GUSTAV EDWARD,GRUSZKA, RAYMOND FRANK,et al. Method for preventing facet coating overspray. US5989637. 1999-11-23. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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