Method for manufacturing an optical device
文献类型：专利
| 作者 | PARK, KYUNG-HYUN; KIM, JONG-HOI; BAEK, YONG-SOON; PARK, MOON-HO; KIM, SUNG-BOCK; OH, KWANG-RYONG |
| 发表日期 | 2003-10-28 |
| 专利号 | US6639735 |
| 著作权人 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method for manufacturing an optical device |
| 英文摘要 | Disclosed is a method for the fabrication of a spot-size converter with a lateral-tapered waveguide (or an active layer), which utilizes a mask during a lithographic process wherein the mask has a pad that can absorb strain to be occurred during forming a lateral-tapered waveguide pattern at its distal end and the lateral-tapered waveguide is fabricated by forming the distal end on the order of about 0.6 mum in width followed by forming the lateral-tapered waveguide on the order of 0.1 mum using an wet etching. Thus, it is possible to reduce a fabrication cost because it is free from a high-resolution electron beam lithography and a stepper, and hence enhance a reproducibility of the lateral-tapered waveguide because it is free from an excessive wet etching during the use of a contact exposure equipment. Further, it is possible to integrate the spot-size converter fabricated by the above with an optical device, resulting in an increased position adjustment and reproducibility of the spot-size converter, which in turn, leads to increase in yield for the optical device. |
| 公开日期 | 2003-10-28 |
| 申请日期 | 2001-08-10 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/44499]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 推荐引用方式 GB/T 7714 | PARK, KYUNG-HYUN,KIM, JONG-HOI,BAEK, YONG-SOON,et al. Method for manufacturing an optical device. US6639735. 2003-10-28. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。