Method of manufacturing semiconductor optical device
文献类型：专利
| 作者 | PARK, KYUNG HYUN; BAEK, YONG SOON; KIM, SUNG BOCK; OH, KWANG RYONG |
| 发表日期 | 2003-07-15 |
| 专利号 | US6593162 |
| 著作权人 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method of manufacturing semiconductor optical device |
| 英文摘要 | The present invention relates to a method of manufacturing a semiconductor optical device. The present invention discloses a method of manufacturing an optical device of a planar buried heterostructure (PBH) type by which an active layer region of a taper shape at both ends is patterned, an undoped InP layer is selectively grown in order to reduce the propagation loss and two waveguides are simultaneously formed by means of a self-aligned method, thus simplifying the process to increase repeatability and yield. |
| 公开日期 | 2003-07-15 |
| 申请日期 | 2002-06-27 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/44512]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
| 推荐引用方式 GB/T 7714 | PARK, KYUNG HYUN,BAEK, YONG SOON,KIM, SUNG BOCK,et al. Method of manufacturing semiconductor optical device. US6593162. 2003-07-15. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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