Method of fabricating an expanded beam optical waveguide device
文献类型：专利
| 作者 | JOHNSON, JOHN EVAN; KETELSEN, LEONARD JAN-PETER; LENTZ, JANET L.; JOYNER, CHARLES H.; SPUTZ, SHARON KAY |
| 发表日期 | 2000-12-19 |
| 专利号 | US6162655 |
| 著作权人 | AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method of fabricating an expanded beam optical waveguide device |
| 英文摘要 | A method of fabricating an expanded beam optical waveguide device (e.g., a laser), comprises the steps of (a) forming a first semiconductor waveguide region having first and second sections of different thickness and an intermediate vertical taper section of varying thickness coupling the first and second sections to one another, the first waveguide region being effective to expand the size of the beam as it propagates from the first section to the second section, (b) forming a second semiconductor region (e.g., a laser active region) on the first waveguide region, (c) etching the second region so as to form an essentially vertical first surface of length A-B which extends obliquely across the propagation axis of the device, (d) forming a third semiconductor region (e.g., a cladding region) on the second region and over the first surface, and (e) etching an elongated mesa along the axis, the mesa extending through at least the second region and the first surface so as to form a second waveguide region having an oblique, essentially second vertical surface which has a length a-b |
| 公开日期 | 2000-12-19 |
| 申请日期 | 1999-01-11 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/44597]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE. LIMITED |
| 推荐引用方式 GB/T 7714 | JOHNSON, JOHN EVAN,KETELSEN, LEONARD JAN-PETER,LENTZ, JANET L.,et al. Method of fabricating an expanded beam optical waveguide device. US6162655. 2000-12-19. |
入库方式： OAI收割
来源：西安光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。