Optical device with an optical coupler for effecting light branching/combining and a method for producing the same
文献类型：专利
| 作者 | UCHIDA, MAMORU, C/O CANON KABUSHIKI KAISHA |
| 发表日期 | 1996-06-05 |
| 专利号 | EP0509236B1 |
| 著作权人 | CANON KABUSHIKI KAISHA |
| 国家 | 欧洲专利局 |
| 文献子类 | 授权发明 |
| 其他题名 | Optical device with an optical coupler for effecting light branching/combining and a method for producing the same |
| 英文摘要 | Disclosed are an optical device having an optical coupler and a method for fabricating the optical device. The optical device includes a semiconductor crystal and a waveguide (101, 102, 103) formed on the semiconductor crystal. The waveguide includes an etched portion having a predetermined pattern and a predetermined depth. A re-grown portion (108) is formed in the etched portion of the waveguide. A coupler portion containing a recess (109) is formed in the re-grown portion. The coupler portion effects at least one of a branching and a combining of the light propagated through the waveguide. The etched portion is formed typically by ion beam etching, and the recess is formed typically by focused ion beam etching. In the method, the etching and the re-growth are performed using the same mask material. |
| 公开日期 | 1996-06-05 |
| 申请日期 | 1992-03-11 |
| 状态 | 失效 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/44620]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | CANON KABUSHIKI KAISHA |
| 推荐引用方式 GB/T 7714 | UCHIDA, MAMORU, C/O CANON KABUSHIKI KAISHA. Optical device with an optical coupler for effecting light branching/combining and a method for producing the same. EP0509236B1. 1996-06-05. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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