Method for fabricating a ridge-shaped laser in a channel
文献类型:专利
作者 | TIJBURG, RUDOLF P.; HABERERN, KEVIN W.; FLAMHOLTZ, SHARON J. |
发表日期 | 1997-10-07 |
专利号 | US5674779 |
著作权人 | PHILIPS ELECTRONICS NORTH AMERICA CORPORATION |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Method for fabricating a ridge-shaped laser in a channel |
英文摘要 | A method for manufacturing a ridge in a channel laser diode in II-VI materials by etching grooves to form an active mesa flanked by support mesas. The method involves using certain etchants for certain compositions of the II-VI layers so that the grooves can be formed by wet chemical etching using only a single photolithographic process. |
公开日期 | 1997-10-07 |
申请日期 | 1995-08-16 |
状态 | 失效 |
源URL | [http://ir.opt.ac.cn/handle/181661/44623] ![]() |
专题 | 半导体激光器专利数据库 |
作者单位 | PHILIPS ELECTRONICS NORTH AMERICA CORPORATION |
推荐引用方式 GB/T 7714 | TIJBURG, RUDOLF P.,HABERERN, KEVIN W.,FLAMHOLTZ, SHARON J.. Method for fabricating a ridge-shaped laser in a channel. US5674779. 1997-10-07. |
入库方式: OAI收割
来源:西安光学精密机械研究所
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