Semiconductor optical devices with differential grating structure and method for manufacturing the same
文献类型：专利
| 作者 | PARK, KYUNG-HYUN; SONG, JUNG-HO; KIM, SUNG-BOCK; OH, KWANG-RYONG |
| 发表日期 | 2005-04-26 |
| 专利号 | US6885804 |
| 著作权人 | INTELLECTUAL DISCOVERY CO. LTD. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Semiconductor optical devices with differential grating structure and method for manufacturing the same |
| 英文摘要 | A semiconductor optical device with a differential grating formed by a holography method and a method for manufacturing the same are provided. The provided semiconductor optical device includes an n-type InP substrate, a stack structure on the InP substrate having a waveguide and active layers, a first grating formed under the stack structure and on the InP substrate, and a second grating formed on the stack structure. The provided method for manufacturing the semiconductor optical device forms a first grating on the n-type InP substrate and under the active layer, and forms a second grating on the active layer. The first and second gratings are formed by the holography method. |
| 公开日期 | 2005-04-26 |
| 申请日期 | 2002-10-25 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/44668]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | INTELLECTUAL DISCOVERY CO. LTD. |
| 推荐引用方式 GB/T 7714 | PARK, KYUNG-HYUN,SONG, JUNG-HO,KIM, SUNG-BOCK,et al. Semiconductor optical devices with differential grating structure and method for manufacturing the same. US6885804. 2005-04-26. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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