Method and system for heterogeneous substrate bonding of waveguide receivers
文献类型：专利
| 作者 | KRASULICK, STEPHEN B.; DALLESASSE, JOHN |
| 发表日期 | 2013-12-17 |
| 专利号 | US8611388 |
| 著作权人 | SKORPIOS TECHNOLOGIES, INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Method and system for heterogeneous substrate bonding of waveguide receivers |
| 英文摘要 | A composite integrated optical device includes a substrate including a silicon layer and a waveguide disposed in the silicon layer. The composite integrated optical device also includes an optical detector bonded to the silicon layer and a bonding region disposed between the silicon layer and the optical detector. The bonding region includes a metal-assisted bond at a first portion of the bonding region. The metal-assisted bond includes an interface layer positioned between the silicon layer and the optical detector. The bonding region also includes a direct semiconductor-semiconductor bond at a second portion of the bonding region. |
| 公开日期 | 2013-12-17 |
| 申请日期 | 2011-03-03 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/44706]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | SKORPIOS TECHNOLOGIES, INC. |
| 推荐引用方式 GB/T 7714 | KRASULICK, STEPHEN B.,DALLESASSE, JOHN. Method and system for heterogeneous substrate bonding of waveguide receivers. US8611388. 2013-12-17. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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