VCSEL array device and method for manufacturing the VCSEL array device
文献类型：专利
| 作者 | MATSUSHITA, KAZUYUKI; UEKI, NOBUAKI |
| 发表日期 | 2011-06-07 |
| 专利号 | US7957447 |
| 著作权人 | FUJI XEROX CO., LTD. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | VCSEL array device and method for manufacturing the VCSEL array device |
| 英文摘要 | Provided is a VCSEL array device that includes at least a first multilayer reflective film, an active layer, and a second multilayer reflective film, formed on a substrate that extends in a longitudinal direction. Plural mesa portions are formed on the substrate by selectively removing at least a portion of the first multilayer reflective film, active layer, and second multilayer reflective film. A selectively oxidized region is formed in at least one of the first multilayer reflective film and the second multilayer reflective film. The VCSEL array device further includes an interlayer insulating film that covers at least a side portion and a bottom portion of the mesa portions, and a surface protecting film that covers the interlayer insulating film. The surface protecting film has plural grooves formed along a longitudinal direction of the substrate in which at least a portion of the surface protecting film is removed. |
| 公开日期 | 2011-06-07 |
| 申请日期 | 2008-08-11 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/44790]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | FUJI XEROX CO., LTD. |
| 推荐引用方式 GB/T 7714 | MATSUSHITA, KAZUYUKI,UEKI, NOBUAKI. VCSEL array device and method for manufacturing the VCSEL array device. US7957447. 2011-06-07. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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