Patterned phase shift layers for wavelength-selectable vertical cavity surface-emitting laser (VCSEL) arrays
文献类型：专利
| 作者 | HWANG, WEN-YEN; ANSELM, KLAUS ALEXANDER; ZHENG, JUN; BAILLARGEON, JAMES N. |
| 发表日期 | 2004-02-24 |
| 专利号 | US6696307 |
| 著作权人 | APPLIED OPTOELECTRONICS, INC. |
| 国家 | 美国 |
| 文献子类 | 授权发明 |
| 其他题名 | Patterned phase shift layers for wavelength-selectable vertical cavity surface-emitting laser (VCSEL) arrays |
| 英文摘要 | A method is provided, the method comprising forming a first of n masking layers for a device and forming a first of n phase-shift layers for the device using the first of the n masking layers. The method also comprises forming a second of n masking layers for a device, and forming a second of n phase-shift layers for the device using the second of the n masking layers and forming at least n+1 and at most 2different optical thicknesses for the device using the n masking layers and the n phase-shift layers. |
| 公开日期 | 2004-02-24 |
| 申请日期 | 2001-09-11 |
| 状态 | 授权 |
| 源URL | [http://ir.opt.ac.cn/handle/181661/45092]  |
| 专题 | 半导体激光器专利数据库 |
| 作者单位 | APPLIED OPTOELECTRONICS, INC. |
| 推荐引用方式 GB/T 7714 | HWANG, WEN-YEN,ANSELM, KLAUS ALEXANDER,ZHENG, JUN,et al. Patterned phase shift layers for wavelength-selectable vertical cavity surface-emitting laser (VCSEL) arrays. US6696307. 2004-02-24. |
入库方式： OAI收割
来源：西安光学精密机械研究所
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